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LEADER 00000nam 2200000uu 4500
001 43368
003 ULIBM
008 150608s19849999eng 000 0 eng d
020 ^a3540133208
050 0 ^aQC176.84.S93^bT46
245 00 ^aThin-film and depth-profile analysis /^cedited by H.Oechsner ; with contributions by H.W. Etzkorn ... [et al.]
260 0 Berlin ;^aNew York :^bSpringer-Verlag,^c1984
300 ^axi, 205 p. :^bill.
490 1 ^aTopics in current physics ;^v37
504 ^aIncludes bibliographical references and index
650 0 ^aThin films^xSurfaces
650 0 ^aSurface chemistry
650 0 ^aSputtering (Physics)
700 10 ^aOechsner, H.^q(Hans)
700 10 ^aEtzkorn, H. W.
999 ^aRodjaney

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